Inventor

NISHIWAKI MICHIKO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “NISHIWAKI MICHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

2 patents

US6483989B1Nov 19, 2002

Substrate processing apparatus and semiconductor device producing method

HITACHI INT ELECTRIC INC551 citations97

US6541344B2Apr 1, 2003

Substrate processing apparatus and semiconductor device manufacturing method

HITACHI INT ELECTRIC INC1 citations51

KOKUSAI ELECTRIC CO LTD

1 patent

US6217663B1Apr 17, 2001

Substrate processing apparatus and substrate processing method

KOKUSAI ELECTRIC CO LTD69 citations94