Inventor

KUECHLER BERND

DE3 patents

⚠️ This page may combine multiple inventors who share the name “KUECHLER BERND”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

INFINEON TECHNOLOGIES AG

2 patents

US7207030B2Apr 17, 2007

Method for improving a simulation model of photolithographic projection

INFINEON TECHNOLOGIES AG10 citations79

US7370313B2May 6, 2008

Method for optimizing a photolithographic mask

INFINEON TECHNOLOGIES AG4 citations60

QIMONDA AG

1 patent

US7855776B2Dec 21, 2010

Methods of compensating lens heating, lithographic projection system and photo mask

QIMONDA AG2 citations58