Inventor

ENG SIMON GOSSELIN

US2 patents

Patents

2 patents

US8419959B2Apr 16, 2013

Clamped monolithic showerhead electrode

BETTENCOURT GREGORY R482 citations96

US8272346B2Sep 25, 2012

Gasket with positioning feature for clamped monolithic showerhead electrode

BETTENCOURT GREGORY R171 citations95