Inventor

NEVIL SHANE C

US8 patents

⚠️ This page may combine multiple inventors who share the name “NEVIL SHANE C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

3 patents

US9358702B2Jun 7, 2016

Temperature management of aluminium nitride electrostatic chuck

APPLIED MATERIALS INC14 citations83

US10854425B2Dec 1, 2020

Feedforward temperature control for plasma processing apparatus

APPLIED MATERIALS INC1 citations61

US9214315B2Dec 15, 2015

Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow

APPLIED MATERIALS INC0 citations50

TAVASSOLI HAMID

3 patents

US8822876B2Sep 2, 2014

Multi-zoned plasma processing electrostatic chuck with improved temperature uniformity

TAVASSOLI HAMID5 citations82

US8629370B2Jan 14, 2014

Assembly for delivering RF power and DC voltage to a plasma processing chamber

TAVASSOLI HAMID5 citations70

US9248509B2Feb 2, 2016

Multi-zoned plasma processing electrostatic chuck with improved temperature uniformity

TAVASSOLI HAMID1 citations50

SILVEIRA FERNANDO M

1 patent

US8916793B2Dec 23, 2014

Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow

SILVEIRA FERNANDO M7 citations77

MAHADESWARASWAMY CHETAN

1 patent

US9338871B2May 10, 2016

Feedforward temperature control for plasma processing apparatus

MAHADESWARASWAMY CHETAN5 citations70