Inventor

SILVEIRA FERNANDO M

US8 patents

⚠️ This page may combine multiple inventors who share the name “SILVEIRA FERNANDO M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

6 patents

US11837479B2Dec 5, 2023

Advanced temperature control for wafer carrier in plasma processing chamber

APPLIED MATERIALS INC6 citations84

US10410889B2Sep 10, 2019

Systems and methods for electrical and magnetic uniformity and skew tuning in plasma processing reactors

APPLIED MATERIALS INC7 citations84

US12272575B2Apr 8, 2025

Advanced temperature control for wafer carrier in plasma processing chamber

APPLIED MATERIALS INC0 citations61

US10854425B2Dec 1, 2020

Feedforward temperature control for plasma processing apparatus

APPLIED MATERIALS INC1 citations61

US9214315B2Dec 15, 2015

Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow

APPLIED MATERIALS INC0 citations50

US12456607B2Oct 28, 2025

Auxiliary plasma source for robust ignition and restrikes in a plasma chamber

APPLIED MATERIALS INC0 citations48

SILVEIRA FERNANDO M

1 patent

US8916793B2Dec 23, 2014

Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow

SILVEIRA FERNANDO M7 citations77

MAHADESWARASWAMY CHETAN

1 patent

US9338871B2May 10, 2016

Feedforward temperature control for plasma processing apparatus

MAHADESWARASWAMY CHETAN5 citations70