Inventor
SAIKI DAISUKE
JP6 patents
Patents
6 patentsUS10236192B2Mar 19, 2019
Liquid processing apparatus, liquid processing method, and storage medium
TOKYO ELECTRON LTD5 citations68
US9192878B2Nov 24, 2015
Liquid processing apparatus
TOKYO ELECTRON LTD5 citations68
US12569887B2Mar 10, 2026
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations50
US12170209B2Dec 17, 2024
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations49
US11908680B2Feb 20, 2024
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations45
US9862007B2Jan 9, 2018
Substrate liquid processing apparatus and method, and computer-readable recording medium with substrate liquid processing program recorded therein
TOKYO ELECTRON LTD0 citations38