Inventor
CHAWLA JASMEET S
US19 patents
⚠️ This page may combine multiple inventors who share the name “CHAWLA JASMEET S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
15 patentsUS10032643B2Jul 24, 2018
Method and structure to contact tight pitch conductive layers with guided vias using alternating hardmasks and encapsulating etchstop liner scheme
INTEL CORP16 citations84
US9385082B2Jul 5, 2016
Method of forming high density, high shorting margin, and low capacitance interconnects by alternating recessed trenches
INTEL CORP7 citations84
US11380617B2Jul 5, 2022
Method of forming high density, high shorting margin, and low capacitance interconnects by alternating recessed trenches
INTEL CORP2 citations73
US11107908B2Aug 31, 2021
Transistors with metal source and drain contacts including a Heusler alloy
INTEL CORP5 citations73
US11056593B2Jul 6, 2021
Semiconductor devices with metal contacts including crystalline alloys
INTEL CORP3 citations73
US10957844B2Mar 23, 2021
Magneto-electric spin orbit (MESO) structures having functional oxide vias
INTEL CORP3 citations73
US10497613B2Dec 3, 2019
Microelectronic conductive routes and methods of making the same
INTEL CORP5 citations73
US9911694B2Mar 6, 2018
Method of forming high density, high shorting margin, and low capacitance interconnects by alternating recessed trenches
INTEL CORP2 citations73
US9379010B2Jun 28, 2016
Methods for forming interconnect layers having tight pitch interconnect structures
INTEL CORP4 citations73
US10256141B2Apr 9, 2019
Maskless air gap to prevent via punch through
INTEL CORP3 citations72
US10109583B2Oct 23, 2018
Method for creating alternate hardmask cap interconnect structure with increased overlay margin
INTEL CORP4 citations72
US11069609B2Jul 20, 2021
Techniques for forming vias and other interconnects for integrated circuit structures
INTEL CORP1 citations62
US10971394B2Apr 6, 2021
Maskless air gap to prevent via punch through
INTEL CORP0 citations62
US10546772B2Jan 28, 2020
Self-aligned via below subtractively patterned interconnect
INTEL CORP1 citations62
US10707186B1Jul 7, 2020
Compliant layer for wafer to wafer bonding
INTEL CORP0 citations40