Inventor
KOEHLER DANIEL
DE10 patents
⚠️ This page may combine multiple inventors who share the name “KOEHLER DANIEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
4 patentsUS6740595B2May 25, 2004
Etch process for recessing polysilicon in trench structures
INFINEON TECHNOLOGIES AG16 citations83
US6939805B2Sep 6, 2005
Method of etching a layer in a trench and method of fabricating a trench capacitor
INFINEON TECHNOLOGIES AG7 citations71
US6777303B2Aug 17, 2004
Method for fabricating an insulation collar in a trench capacitor
INFINEON TECHNOLOGIES AG11 citations70
US7265025B2Sep 4, 2007
Method for filling trench and relief geometries in semiconductor structures
INFINEON TECHNOLOGIES AG6 citations60