Inventor
LATCHFORD IAN
US5 patents
⚠️ This page may combine multiple inventors who share the name “LATCHFORD IAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS7332262B2Feb 19, 2008
Photolithography scheme using a silicon containing resist
APPLIED MATERIALS INC23 citations91
US6967072B2Nov 22, 2005
Photolithography scheme using a silicon containing resist
APPLIED MATERIALS INC41 citations91
US6868856B2Mar 22, 2005
Enhanced remote plasma cleaning
APPLIED MATERIALS INC9 citations70