Inventor
YOUNKIN TODD R
US7 patents
⚠️ This page may combine multiple inventors who share the name “YOUNKIN TODD R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
6 patentsUS10256141B2Apr 9, 2019
Maskless air gap to prevent via punch through
INTEL CORP3 citations72
US10109583B2Oct 23, 2018
Method for creating alternate hardmask cap interconnect structure with increased overlay margin
INTEL CORP4 citations72
US10971394B2Apr 6, 2021
Maskless air gap to prevent via punch through
INTEL CORP0 citations62
US10950501B2Mar 16, 2021
Triblock copolymers for self-aligning vias or contacts
INTEL CORP0 citations59
US10269622B2Apr 23, 2019
Materials and deposition schemes using photoactive materials for interface chemical control and patterning of predefined structures
INTEL CORP0 citations51
US10678137B2Jun 9, 2020
Multi-pass patterning using nonreflecting radiation lithography on an underlying grating
INTEL CORP0 citations41