Inventor
FROEMKE BRAD
US5 patents
Patents
5 patentsUS7187188B2Mar 6, 2007
Chuck with integrated wafer support
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US7362115B2Apr 22, 2008
Chuck with integrated wafer support
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US6777964B2Aug 17, 2004
Probe station
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US7368925B2May 6, 2008
Probe station with two platens
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US7688091B2Mar 30, 2010
Chuck with integrated wafer support
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