Inventor

MACINTOSH EDWARD

US3 patents

⚠️ This page may combine multiple inventors who share the name “MACINTOSH EDWARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARIAN SEMICONDUCTOR EQUIPMENT

1 patent

US7309997B1Dec 18, 2007

Monitor system and method for semiconductor processes

VARIAN SEMICONDUCTOR EQUIPMENT14 citations77

HERTEL RICHARD

1 patent

US8746666B2Jun 10, 2014

Media carrier

HERTEL RICHARD4 citations62

FAIRHURST JOHN ROBERT

1 patent

US9218990B2Dec 22, 2015

Method and apparatus for holding a plurality of substrates for processing

FAIRHURST JOHN ROBERT1 citations47