Inventor
SHIGEMATSU JUNJI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “SHIGEMATSU JUNJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO CHEMICAL CO
3 patentsUS7494763B2Feb 24, 2009
Polyhydric phenol compound and chemically amplified resist composition containing the same
SUMITOMO CHEMICAL CO6 citations61
US8003296B2Aug 23, 2011
Chemically amplified positive resist composition
SUMITOMO CHEMICAL CO0 citations51
US7667050B2Feb 23, 2010
Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same
SUMITOMO CHEMICAL CO1 citations51