Inventor

CALLAN NEAL P

US6 patents

⚠️ This page may combine multiple inventors who share the name “CALLAN NEAL P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LSI LOGIC CORP

2 patents

US7189498B2Mar 13, 2007

Process and apparatus for generating a strong phase shift optical pattern for use in an optical direct write lithography process

LSI LOGIC CORP11 citations82

US7005217B2Feb 28, 2006

Chromeless phase shift mask

LSI LOGIC CORP6 citations60

LSI CORP

2 patents

US7372547B2May 13, 2008

Process and apparatus for achieving single exposure pattern transfer using maskless optical direct write lithography

LSI CORP8 citations71

US8377633B2Feb 19, 2013

Maskless vortex phase shift optical direct write lithography

LSI CORP0 citations50

AVAGO TECHNOLOGIES GENERAL IP

1 patent

US9188848B2Nov 17, 2015

Maskless vortex phase shift optical direct write lithography

AVAGO TECHNOLOGIES GENERAL IP1 citations60

EIB NICHOLAS K

1 patent

US8057963B2Nov 15, 2011

Maskless vortex phase shift optical direct write lithography

EIB NICHOLAS K1 citations54