Inventor
URANO KOTOKO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “URANO KOTOKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
4 patentsUS9287084B2Mar 15, 2016
Aberration corrector and charged particle beam apparatus using the same
HITACHI HIGH TECH CORP3 citations71
US10446361B2Oct 15, 2019
Aberration correction method, aberration correction system, and charged particle beam apparatus
HITACHI HIGH TECH CORP1 citations61
US10727024B2Jul 28, 2020
Charged particle beam device and aberration correction method for charged particle beam device
HITACHI HIGH TECH CORP0 citations40
US9530614B2Dec 27, 2016
Charged particle beam device and arithmetic device
HITACHI HIGH TECH CORP0 citations40