Inventor
HONG SEOKHYOUNG
KR6 patents
Patents
6 patentsUS10483100B2Nov 19, 2019
Method for forming TiON film
TOKYO ELECTRON LTD42 citations91
US10927453B2Feb 23, 2021
TiN-based film and TiN-based film forming method
TOKYO ELECTRON LTD0 citations60
US10199451B2Feb 5, 2019
Lower electrode of DRAM capacitor and manufacturing method thereof
TOKYO ELECTRON LTD0 citations49
US12392029B2Aug 19, 2025
Titanium nitride film forming method and titanium nitride film forming apparatus
TOKYO ELECTRON LTD0 citations43
US10864548B2Dec 15, 2020
Film forming method and film forming apparatus
TOKYO ELECTRON LTD0 citations40
US10529598B2Jan 7, 2020
Microwave heat treatment apparatus and microwave heat treatment method
TOKYO ELECTRON LTD0 citations36