P

Inventor

GAROFALO JOSEPH G

US6 patents
⚠️ This page may combine multiple inventors who share the name “GAROFALO JOSEPH G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AT & T BELL LAB

5 patents
US5275896AJan 4, 1994

Single-alignment-level lithographic technique for achieving self-aligned features

AT & T BELL LAB72 citations95
US5308721AMay 3, 1994

Self-aligned method of making phase-shifting lithograhic masks having three or more phase-shifts

AT & T BELL LAB45 citations92
US5338626AAug 16, 1994

Fabrication of phase-shifting lithographic masks

AT & T BELL LAB22 citations91
US5153083AOct 6, 1992

Method of making phase-shifting lithographic masks

AT & T BELL LAB26 citations91
US5358827AOct 25, 1994

Phase-shifting lithographic masks with improved resolution

AT & T BELL LAB15 citations72

LUCENT TECHNOLOGIES INC

1 patent
US5636002AJun 3, 1997

Auxiliary mask features for enhancing the resolution of photolithography

LUCENT TECHNOLOGIES INC227 citations97