P

Inventor

KOSTELAK JR ROBERT L

US7 patents
⚠️ This page may combine multiple inventors who share the name “KOSTELAK JR ROBERT L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AT & T BELL LAB

5 patents
US5275896AJan 4, 1994

Single-alignment-level lithographic technique for achieving self-aligned features

AT & T BELL LAB72 citations95
US4992394AFeb 12, 1991

Self aligned registration marks for integrated circuit fabrication

AT & T BELL LAB32 citations92
US5338626AAug 16, 1994

Fabrication of phase-shifting lithographic masks

AT & T BELL LAB22 citations91
US5153083AOct 6, 1992

Method of making phase-shifting lithographic masks

AT & T BELL LAB26 citations91
US5358827AOct 25, 1994

Phase-shifting lithographic masks with improved resolution

AT & T BELL LAB15 citations72

LUCENT TECHNOLOGIES INC

1 patent
US5589303ADec 31, 1996

Self-aligned opaque regions for attenuating phase-shifting masks

LUCENT TECHNOLOGIES INC17 citations72

AT & T CORP

1 patent
US5538819AJul 23, 1996

Self-aligned alignment marks for phase-shifting masks

AT & T CORP12 citations71