Inventor
SAMIZU HIROAKI
JP3 patents
Patents
3 patentsUS7508492B2Mar 24, 2009
Surface light source control apparatus and surface light source control method
SHINKO ELECTRIC IND CO21 citations90
US7486383B2Feb 3, 2009
Direct exposure apparatus and direct exposure method
SHINKO ELECTRIC IND CO2 citations60
US7397537B2Jul 8, 2008
Exposure apparatus and exposure method
SHINKO ELECTRIC IND CO2 citations59