Inventor

BASAK SANJAY

US3 patents

⚠️ This page may combine multiple inventors who share the name “BASAK SANJAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SPEEDFAM CORP

1 patent

US6555466B1Apr 29, 2003

Two-step chemical-mechanical planarization for damascene structures on semiconductor wafers

SPEEDFAM CORP17 citations82

UNIV TEXAS

1 patent

US5368632ANov 29, 1994

Redox polymer films for metal recovery applications

UNIV TEXAS6 citations71

SPEEDFAM IPEC CORP

1 patent

US6387188B1May 14, 2002

Pad conditioning for copper-based semiconductor wafers

SPEEDFAM IPEC CORP5 citations60