Inventor

EBNER KATRIN

DE3 patents

⚠️ This page may combine multiple inventors who share the name “EBNER KATRIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MOTOROLA INC

1 patent

US6375549B1Apr 23, 2002

Polishing head for wafer, and method for polishing

MOTOROLA INC22 citations86

INFINEON TECHNOLOGIES SC300

1 patent

US6824456B2Nov 30, 2004

Configuration for polishing disk-shaped objects

INFINEON TECHNOLOGIES SC30010 citations70

INFINEON TECHNOLOGIES SC 300 G

1 patent

US7156933B2Jan 2, 2007

Configuration and method for mounting a backing film to a polish head

INFINEON TECHNOLOGIES SC 300 G1 citations42