Inventor · disambiguated record
Lutz Teichgräber
Also filed as: TEICHGRAEBER LUTZ
3 granted patents·45 citations·filing 2000–2003
69Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0175US6739013B2Wafer cleaning apparatusINFINEON TECHNOLOGIES SC300·Filed 2001·Granted May 25, 2004·22 cites·9 claims
- 0274US6375549B1Polishing head for wafer, and method for polishingMOTOROLA INC·Filed 2000·Granted Apr 23, 2002·22 cites·17 claims
- 0337US7156933B2Configuration and method for mounting a backing film to a polish headINFINEON TECHNOLOGIES SC 300 G·Filed 2003·Granted Jan 2, 2007·1 cites·22 claims
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