Inventor
SUGAWARA KATSUAKI
JP2 patents
Patents
2 patentsUS9583318B2Feb 28, 2017
Plasma processing apparatus, plasma processing method, and recording medium
TOKYO ELECTRON LTD1 citations47
US10002417B2Jun 19, 2018
Ready for rotation state detection device, method of detecting ready for rotation state and substrate processing apparatus
TOKYO ELECTRON LTD0 citations33