Inventor
CHAN CHIH-HUA
TW2 patents
Patents
2 patentsUS9997336B2Jun 12, 2018
Multi-zone gas distribution plate (GDP) and a method for designing the multi-zone GDP
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68
US10957516B2Mar 23, 2021
Multi-zone gas distribution plate (GDP) and a method for designing the multi-zone GDP
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57