Inventor
CLEMONS MAXIMILLIAN
US7 patents
⚠️ This page may combine multiple inventors who share the name “CLEMONS MAXIMILLIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS10916433B2Feb 9, 2021
Methods of forming metal silicide layers and metal silicide layers formed therefrom
APPLIED MATERIALS INC14 citations85
US10566188B2Feb 18, 2020
Method to improve film stability
APPLIED MATERIALS INC16 citations85
US10704141B2Jul 7, 2020
In-situ CVD and ALD coating of chamber to control metal contamination
APPLIED MATERIALS INC7 citations83
US11289342B2Mar 29, 2022
Damage free metal conductor formation
APPLIED MATERIALS INC0 citations62
US10685849B1Jun 16, 2020
Damage free metal conductor formation
APPLIED MATERIALS INC1 citations62
US11901222B2Feb 13, 2024
Multi-step process for flowable gap-fill film
APPLIED MATERIALS INC0 citations51