Inventor

MCMARR PATRICK

US2 patents

Patents

2 patents

US5795813AAug 18, 1998

Radiation-hardening of SOI by ion implantation into the buried oxide layer

US NAVY71 citations92

US6071791AJun 6, 2000

Radiation-hardening of microelectronic devices by ion implantation into the oxide and annealing

US NAVY36 citations89