Inventor
ENAMI TATSUO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “ENAMI TATSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOMATSU MFG CO LTD
3 patentsUS6243163B1Jun 5, 2001
Wavelength detector
KOMATSU MFG CO LTD18 citations83
US6337872B1Jan 8, 2002
Once through fan for excimer laser apparatus
KOMATSU MFG CO LTD13 citations72
US6819699B1Nov 16, 2004
Arf excimer laser device, scanning type exposure device and ultraviolet laser device
KOMATSU MFG CO LTD5 citations61
GIGAPHOTON INC
3 patentsUS7196796B2Mar 27, 2007
Wavelength detecting apparatus, laser apparatus, and wavelength detecting method
GIGAPHOTON INC10 citations82
US6636297B2Oct 21, 2003
Vacuum ultraviolet laser wavelength measuring apparatus
GIGAPHOTON INC9 citations73
US7984539B2Jul 26, 2011
Chamber replacing method
GIGAPHOTON INC3 citations62