Inventor
BRADY GREGORY R
US5 patents
Patents
5 patentsUS9518916B1Dec 13, 2016
Compressive sensing for metrology
KLA TENCOR CORP38 citations93
US10203247B2Feb 12, 2019
Systems for providing illumination in optical metrology
KLA TENCOR CORP10 citations81
US10527830B2Jan 7, 2020
Off-axis reflective afocal optical relay
KLA TENCOR CORP1 citations60
US9512985B2Dec 6, 2016
Systems for providing illumination in optical metrology
KLA TENCOR CORP2 citations60
US10062157B2Aug 28, 2018
Compressive sensing for metrology
KLA TENCOR CORP1 citations51