Inventor
SATOH TSUNEO
JP3 patents
Patents
3 patentsUS5061985AOct 29, 1991
Semiconductor integrated circuit device and process for producing the same
HITACHI LTD164 citations96
US4910582AMar 20, 1990
Semiconductor device and method of manufacturing thereof
HITACHI LTD32 citations91
US4822989AApr 18, 1989
Semiconductor device and method of manufacturing thereof
HITACHI LTD31 citations91