Inventor · disambiguated record

Hirofumi Kakutani

Also filed as: KAKUTANI HIROFUMI

1 granted patent·45 citations·filing 1994–1994

48Inventor score

Technology areasH10P

Files withHITACHI LTD1

Top patents by PatentIndex Score

1 record

0165US5861601AMicrowave plasma processing apparatus and methodHITACHI LTD·Filed 1994·Granted Jan 19, 1999·45 cites·2 claims

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