Inventor
CHUANG CHIH-SHIN
TW3 patents
Patents
3 patentsUS6670093B2Dec 30, 2003
Silicon-containing copolymer and photosensitive resin composition containing the same
IND TECH RES INST8 citations69
US7026091B2Apr 11, 2006
Positive photoresist composition and patterning process using the same
IND TECH RES INST4 citations59
US7338747B2Mar 4, 2008
Photoresist composition and method pattern forming using the same
IND TECH RES INST1 citations48