Inventor

STIBLERT LARS

SE9 patents

⚠️ This page may combine multiple inventors who share the name “STIBLERT LARS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MICRONIC LASER SYSTEMS AB

4 patents

US6948254B2Sep 27, 2005

Method for calibration of a metrology stage

MICRONIC LASER SYSTEMS AB18 citations82

US7912671B2Mar 22, 2011

Method for measuring the position of a mark in a deflector system

MICRONIC LASER SYSTEMS AB3 citations61

US7148971B2Dec 12, 2006

Apparatus for measuring the physical properties of a surface and a pattern generating apparatus for writing a pattern on a surface

MICRONIC LASER SYSTEMS AB6 citations61

US7365829B2Apr 29, 2008

Method and apparatus for image formation

MICRONIC LASER SYSTEMS AB0 citations44

BIOSTAR INC

2 patents

US5631171AMay 20, 1997

Method and instrument for detection of change of thickness or refractive index for a thin film substrate

BIOSTAR INC420 citations98

US5494829AFeb 27, 1996

Devices and methods for detection of an analyte based upon light interference

BIOSTAR INC144 citations98

STIBLERT LARS

2 patents

US8122846B2Feb 28, 2012

Platforms, apparatuses, systems and methods for processing and analyzing substrates

STIBLERT LARS55 citations94

US8822879B2Sep 2, 2014

Writing apparatuses and methods

STIBLERT LARS1 citations48

SANDSTROEM TORBJOERN

1 patent

US8160351B2Apr 17, 2012

Method and apparatus for mura detection and metrology

SANDSTROEM TORBJOERN31 citations91