Inventor · disambiguated record

Marshal A. Miller

Also filed as: MILLER MARSHAL A

2 granted patents·1 citations·filing 2015–2017

34Inventor score

Technology areasG06F

Files withIBM2

Top patents by PatentIndex Score

2 records

0164US9928316B2Process-metrology reproducibility bands for lithographic photomasksIBM·Filed 2015·Granted Mar 27, 2018·1 cites·15 claims
0254US10210292B2Process-metrology reproducibility bands for lithographic photomasksIBM·Filed 2017·Granted Feb 19, 2019·0 cites·15 claims

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