Inventor
HSIAO TSAI-FU
TW17 patents
⚠️ This page may combine multiple inventors who share the name “HSIAO TSAI-FU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNITED MICROELECTRONICS CORP
10 patentsUS7553763B2Jun 30, 2009
Salicide process utilizing a cluster ion implantation process
UNITED MICROELECTRONICS CORP22 citations92
US7473606B2Jan 6, 2009
Method for fabricating metal-oxide semiconductor transistors
UNITED MICROELECTRONICS CORP27 citations92
US7550336B2Jun 23, 2009
Method for fabricating an NMOS transistor
UNITED MICROELECTRONICS CORP14 citations82
US7396717B2Jul 8, 2008
Method of forming a MOS transistor
UNITED MICROELECTRONICS CORP15 citations82
US6112013AAug 29, 2000
Apparatus for detecting a crack in a heater of an acid and rinse bath and a method of crack detection of the same
UNITED MICROELECTRONICS CORP16 citations75
US9502305B2Nov 22, 2016
Method for manufacturing CMOS transistor
UNITED MICROELECTRONICS CORP4 citations73
US7795101B2Sep 14, 2010
Method of forming a MOS transistor
UNITED MICROELECTRONICS CORP7 citations71
US7927954B2Apr 19, 2011
Method for fabricating strained-silicon metal-oxide semiconductor transistors
UNITED MICROELECTRONICS CORP2 citations63
US7892935B2Feb 22, 2011
Semiconductor process
UNITED MICROELECTRONICS CORP2 citations62
US8053847B2Nov 8, 2011
Method for fabricating metal-oxide semiconductor transistors
UNITED MICROELECTRONICS CORP0 citations51
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS9228260B1Jan 5, 2016
Wafer processing chamber, heat treatment apparatus and method for processing wafers
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US12014922B2Jun 18, 2024
Apparatus for manufacturing a thin film and a method therefor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11244822B2Feb 8, 2022
Apparatus for manufacturing a thin film and a method therefor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US9607826B2Mar 28, 2017
Semiconductor device manufacturing methods and methods of forming insulating material layers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52