Inventor
LIN ANTHONY
TW7 patents
⚠️ This page may combine multiple inventors who share the name “LIN ANTHONY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS9873943B2Jan 23, 2018
Apparatus and method for spatial atomic layer deposition
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations83
US10161039B2Dec 25, 2018
Apparatus and method for spatial atomic layer deposition
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US11008654B2May 18, 2021
Apparatus and method for spatial atomic layer deposition
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10494716B2Dec 3, 2019
Apparatus and method for spatial atomic layer deposition
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51