Inventor
MIZUKAMI TATSUHIRO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “MIZUKAMI TATSUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MIZUKAMI TATSUHIRO
3 patentsUS8668836B2Mar 11, 2014
Plasma processing device and method of monitoring plasma discharge state in plasma processing device
MIZUKAMI TATSUHIRO99 citations95
US8585862B2Nov 19, 2013
Plasma processing device and plasma discharge state monitoring device
MIZUKAMI TATSUHIRO4 citations60
US8956499B2Feb 17, 2015
Plasma processing device
MIZUKAMI TATSUHIRO0 citations39