Inventor

SINGU RAJ

US3 patents

Patents

3 patents

USD900036SOct 27, 2020

Heater electrical connector and adapter

ASM IP HOLDING BV352 citations93

US11404302B2Aug 2, 2022

Substrate susceptor using edge purging

ASM IP HOLDING BV4 citations71

US12406871B2Sep 2, 2025

Substrate susceptor using edge purging

ASM IP HOLDING BV1 citations63