Inventor
RUH WOLF-DIETER
6 patents
Patents
6 patentsUS4512847AApr 23, 1985
Method of measuring the thickness of the removed layer in subtractive workpiece processing
IBM41 citations91
US4066491AJan 3, 1978
Method of simultaneously etching multiple tapered viaducts in semiconductor material
IBM34 citations91
US4059480ANov 22, 1977
Method of forming viaducts in semiconductor material
IBM38 citations91
US4426265AJan 17, 1984
Method of producing a metallic thin film magnetic disk
IBM22 citations81
US5022956AJun 11, 1991
Producing viaholes in plastic sheets and application of the method
IBM16 citations78
US4834835AMay 30, 1989
Producing viaholes in plastic sheets and application of the method
IBM9 citations70