Inventor

TSUI Y M

TW2 patents

Patents

2 patents

US5874356AFeb 23, 1999

Method for forming zig-zag bordered openings in semiconductor structures

TAIWAN SEMICONDUCTOR MFG17 citations86

US6316835B1Nov 13, 2001

Method for forming zig-zag bordered openings in semiconductor structures and structures formed

TAIWAN SEMICONDUCTOR MFG9 citations68