Inventor
MOURI ISAMU
JP5 patents
Patents
5 patentsUS6659111B1Dec 9, 2003
Cleaning gas and method for cleaning vacuum treatment apparatus by flowing the cleaning gas
CENTRAL GLASS CO LTD312 citations98
US6147006ANov 14, 2000
Cleaning gas
CENTRAL GLASS CO LTD26 citations91
US7168436B2Jan 30, 2007
Gas for removing deposit and removal method using same
CENTRAL GLASS CO LTD11 citations83
US7744769B2Jun 29, 2010
Gas for removing deposit and removal method using same
CENTRAL GLASS CO LTD6 citations72
US5069724ADec 3, 1991
Method of cleaning carbon member contaminated with inorganic deposits
CENTRAL GLASS CO LTD13 citations68