Inventor · disambiguated record

Yasuto Kawashima

Also filed as: KAWASHIMA YASUTO

1 granted patent·12 citations·filing 2004–2004

34Inventor score

Technology areasG01N

Files withNIKON CORP1

Top patents by PatentIndex Score

1 record

0168US7330042B2Substrate inspection system, substrate inspection method, and substrate inspection apparatusNIKON CORP·Filed 2004·Granted Feb 12, 2008·12 cites·6 claims

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