Inventor
ZHANG QI HAU
CN2 patents
Patents
2 patentsUS7504269B2Mar 17, 2009
Method for treatment of samples for auger electronic spectrometer (AES) in the manufacture of integrated circuits
SEMICONDUCTOR MFG INT SHANGHAI3 citations55
US7927893B2Apr 19, 2011
Method for treatment of samples for auger electronic spectrometer (AES) in the manufacture of integrated circuits
SEMICONDUCTOR MFG INT SHANGHAI1 citations45