Inventor

CERIO FRANK

US2 patents

Patents

2 patents

US6755945B2Jun 29, 2004

Ionized PVD with sequential deposition and etching

TOKYO ELECTRON LTD108 citations94

US7744735B2Jun 29, 2010

Ionized PVD with sequential deposition and etching

TOKYO ELECTRON LTD6 citations60