Inventor
AGGARWAL RAVINDER K
US13 patents
⚠️ This page may combine multiple inventors who share the name “AGGARWAL RAVINDER K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INC
9 patentsUS9267850B2Feb 23, 2016
Thermocouple assembly with guarded thermocouple junction
ASM INC467 citations98
US8382370B2Feb 26, 2013
Thermocouple assembly with guarded thermocouple junction
ASM INC345 citations98
US6776849B2Aug 17, 2004
Wafer holder with peripheral lift ring
ASM INC324 citations98
US7449071B2Nov 11, 2008
Wafer holder with peripheral lift ring
ASM INC20 citations92
US6592318B2Jul 15, 2003
Docking cart with integrated load port
ASM INC31 citations92
US6465761B2Oct 15, 2002
Heat lamps for zone heating
ASM INC34 citations92
US6158951ADec 12, 2000
Wafer carrier and method for handling of wafers with minimal contact
ASM INC34 citations90
US6318957B1Nov 20, 2001
Method for handling of wafers with minimal contact
ASM INC32 citations89
US8927435B2Jan 6, 2015
Load lock having secondary isolation chamber
ASM INC0 citations47