Inventor
ASAYAMA TAKESHI
JP21 patents
⚠️ This page may combine multiple inventors who share the name “ASAYAMA TAKESHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GIGAPHOTON INC
15 patentsUS9742141B2Aug 22, 2017
Laser chamber
GIGAPHOTON INC6 citations72
US11079686B2Aug 3, 2021
Excimer laser apparatus and electronic-device manufacturing method
GIGAPHOTON INC2 citations69
US8901524B2Dec 2, 2014
Extreme ultraviolet light source apparatus
GIGAPHOTON INC2 citations63
US11451003B2Sep 20, 2022
Laser gas regenerating apparatus and electronic device manufacturing method
GIGAPHOTON INC1 citations61
US10971886B2Apr 6, 2021
Laser apparatus
GIGAPHOTON INC0 citations52
US10177520B2Jan 8, 2019
Excimer laser apparatus and excimer laser system
GIGAPHOTON INC0 citations52
US9991665B2Jun 5, 2018
Laser system
GIGAPHOTON INC0 citations52
US9853410B2Dec 26, 2017
Gas laser device and control method therefor
GIGAPHOTON INC0 citations52
US9837780B2Dec 5, 2017
Excimer laser apparatus and excimer laser system
GIGAPHOTON INC1 citations52
US9806490B2Oct 31, 2017
Laser system
GIGAPHOTON INC0 citations52
US9601893B2Mar 21, 2017
Laser apparatus
GIGAPHOTON INC0 citations52
US11239625B2Feb 1, 2022
Laser apparatus including gas supply device and exhausting device
GIGAPHOTON INC0 citations51
US10965090B2Mar 30, 2021
Laser apparatus
GIGAPHOTON INC0 citations51
US9331450B2May 3, 2016
Laser apparatus
GIGAPHOTON INC0 citations50
US10050403B2Aug 14, 2018
Excimer laser chamber device
GIGAPHOTON INC0 citations38
ASAYAMA TAKESHI
3 patentsUS8586954B2Nov 19, 2013
Extreme ultraviolet light source apparatus
ASAYAMA TAKESHI13 citations91
US8158959B2Apr 17, 2012
Extreme ultraviolet light source apparatus
ASAYAMA TAKESHI14 citations91
US8536550B2Sep 17, 2013
Method and apparatus for cleaning collector mirror in EUV light generator
ASAYAMA TAKESHI7 citations83