Inventor · disambiguated record
Hidenobu Shirai
Also filed as: SHIRAI HIDENOBU
3 granted patents·181 citations·filing 1988–1999
77Inventor score
Files withFUJITSU LTD3
Top patents by PatentIndex Score
3 records- 0184US4872964APlanar magnetron sputtering apparatus and its magnetic sourceFUJITSU LTD·Filed 1988·Granted Oct 10, 1989·54 cites·9 claims
- 0282US6186722B1Chamber apparatus for processing semiconductor devicesFUJITSU LTD·Filed 1998·Granted Feb 13, 2001·87 cites·18 claims
- 0369US6746195B2Semiconductor transfer and manufacturing apparatusFUJITSU LTD·Filed 1999·Granted Jun 8, 2004·40 cites·19 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →