Inventor
MODDERMAN THEODORUS M
NL5 patents
⚠️ This page may combine multiple inventors who share the name “MODDERMAN THEODORUS M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
4 patentsUS6674510B1Jan 6, 2004
Off-axis levelling in lithographic projection apparatus
ASML NETHERLANDS BV192 citations95
US6882405B2Apr 19, 2005
Off-axis levelling in lithographic projection apparatus
ASML NETHERLANDS BV13 citations90
US7019815B2Mar 28, 2006
Off-axis leveling in lithographic projection apparatus
ASML NETHERLANDS BV19 citations89
US7202938B2Apr 10, 2007
Off-axis levelling in lithographic projection apparatus
ASML NETHERLANDS BV5 citations68