Inventor

HEUTS FREDERIK T E

NL3 patents

Patents

3 patents

US6674510B1Jan 6, 2004

Off-axis levelling in lithographic projection apparatus

ASML NETHERLANDS BV192 citations95

US7019815B2Mar 28, 2006

Off-axis leveling in lithographic projection apparatus

ASML NETHERLANDS BV19 citations89

US7202938B2Apr 10, 2007

Off-axis levelling in lithographic projection apparatus

ASML NETHERLANDS BV5 citations68