Inventor

DENGEL GUENTHER

DE7 patents

⚠️ This page may combine multiple inventors who share the name “DENGEL GUENTHER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

3 patents

US9671584B2Jun 6, 2017

Method and cooling system for cooling an optical element for EUV applications

ZEISS CARL SMT GMBH0 citations49

US7990520B2Aug 2, 2011

Microlithography illumination systems, components and methods

ZEISS CARL SMT GMBH0 citations49

US9684243B2Jun 20, 2017

Blocking element for protecting optical elements in projection exposure apparatuses

ZEISS CARL SMT GMBH0 citations30

EHM DIRK HEINRICH

1 patent

US9041905B2May 26, 2015

Optical arrangement, in particular in a projection exposure apparatus for EUV lithography

EHM DIRK HEINRICH4 citations70

ZEISS CARL SMT AG

1 patent

US7858957B2Dec 28, 2010

Illumination optics for projection microlithography

ZEISS CARL SMT AG6 citations60

WARM BERNDT

1 patent

US8643825B2Feb 4, 2014

Microlithography illumination systems, components and methods

WARM BERNDT0 citations47

WEVERS RUTGER

1 patent

US8831170B2Sep 9, 2014

Mirror with a mirror carrier and projection exposure apparatus

WEVERS RUTGER0 citations41