Inventor
ENGELEN ADRIANUS FRANCISCUS PETRUS
NL9 patents
⚠️ This page may combine multiple inventors who share the name “ENGELEN ADRIANUS FRANCISCUS PETRUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
6 patentsUS7724351B2May 25, 2010
Lithographic apparatus, device manufacturing method and exchangeable optical element
ASML NETHERLANDS BV12 citations89
US7961293B2Jun 14, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations71
US9964853B2May 8, 2018
Method of determining dose and focus, inspection apparatus, patterning device, substrate and device manufacturing method
ASML NETHERLANDS BV6 citations68
US10222703B2Mar 5, 2019
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations51
US9778575B2Oct 3, 2017
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations51
US9285685B2Mar 15, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50